NATIONAL TSING HUA UNIVERSITY

A Y-AXIS SOI-MEMS GYROSCOPE WITH A ZIGZAG-SHAPED Z-ELECTRODE

SUPPORTED BY THREE-DIMENSIONALLY-INTERSECTED Z-BEAMS

Presenter : Chun-You Liu (劉峻佑 )Instructor : Cheng-Hsien Liu (劉承賢 )

Midterm Project PresentationPresentation IApril 14, 2014

National Tsing Hua UniversityHsinChu, Taiwan

NATIONAL TSING HUA UNIVERSITY

Outline

Introduction Principle Purpose Design concept Experiment result Conclusion

NATIONAL TSING HUA UNIVERSITY

Outline

Introduction Principle Purpose Design concept Experiment result Conclusion

NATIONAL TSING HUA UNIVERSITY

Introduction

• Automobile application

NATIONAL TSING HUA UNIVERSITY

Introduction

• Smart phone application

NATIONAL TSING HUA UNIVERSITY

Outline

Introduction Principle Purpose Design concept Experiment result Conclusion

NATIONAL TSING HUA UNIVERSITY

Principle

• Important parameters in sensors

Selectivity

Resolution

Accuracy

Dynamic range

NATIONAL TSING HUA UNIVERSITY

Outline

Introduction Principle Purpose Design concept Experiment result Conclusion

NATIONAL TSING HUA UNIVERSITY

Purpose

• Gyroscope

Sensitivity

Full-scale range

Linearity

NATIONAL TSING HUA UNIVERSITY

Outline

Introduction Principle Purpose Design concept Experiment result Conclusion

NATIONAL TSING HUA UNIVERSITY

Design concept

• Important parameters in sensors

NATIONAL TSING HUA UNIVERSITY

Outline

Introduction Principle Purpose Design concept Experiment result Conclusion

NATIONAL TSING HUA UNIVERSITY

Outline

Introduction Principle Purpose Design concept Experiment result Conclusion