INUP Presentation Apr 2012

8/10/2019 INUP Presentation Apr 2012

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:

Design,FabricationandTest

SiddharthaP.Duttagupta

IndianInstituteofTechnologyBombay

_


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IITBEEMEMSOverview

Research, Education, Training, Collaboration:

Crossinstitution research: 2 microfluidics for electronics

, , ,

transceiver, Multiferroic RF inductor, Polymer accelerometer,

also activities in Suman Mashruwala Lab and Biosciences Dept

MEMS institute elective (EE701), also dept electives in

Mechanical (P Gandhi) and Biosciences (R Srivastava)

(May 2012)

Partners: IITB (Centre Res Nano Tech Science, Earth Sciences,

Mechanical, Physics, Systems & Control*), Mumbai Univ., VJTI,

Univ. Pune, CMET, Nanded Univ., SAMEER, IIT Hyderabad, NPCIL,

, , , ,

BITS(Dubai)*, Cal Univ*, Joint Science Academies SRF Programme*


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GreenEnergyManagementSystems

Integration

and

Optimization

SourceSolarPVSPV

FuelCellFC

Components

SolarPV

Array

DCDC

ACGridDC

AC

Converters

DC

to

DCDCtoAC

Fuel

Cell DCLoadDC

DC DC DC

StorageBattery

UltraCapacitorTidal

Storage

Battery,AC DC

DCsource

Onchip

LoadVariableDC

VariableAC

Power UltraCap

Generation Conversion Distribution

DC DC

Partners:VAgarwal,AGuha,MNGandhi,DRamakrishnan,AAgrawal,SGSingh(IITB),

KPRay

(SAMEER),

SA

Gangal (U

Pune),

GJ

Phatak (CMET

),

TCS,

CGL,

Datar ,

Sasken


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Motivation and Sco e

u purpose supp y rom on onven ona ources

MicroscaleEnergySourceforonchippower

DegradationMonitoringforlowsystemlifetimecost

ReliablePowerGenerationunderNonOptimalConditions


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Background- Fuel Cell

Electrochemical conversion

Device (Hydrogen Cell)

+Fuel (H2)

at Anode

Oxidant (O2)

at CathodeReactants_

Load

Bi Cubic

Fuel Cell

Stack

Other Fuels Hydrocarbons, Alcohols [1]

Other Oxidants Chlorine

Operational temp. < 1000C

ApplicationsFuel Cell vehicle create electricity using H2 fuel and O2 from air [1]

Uninterrupted power supply instant protection from momentary power failure

Emer enc ower s stems and Co eneration for small scale networks

[1] Fuel Cell Handbook, Fundamentals and Survey of Systems,John Wiley Publication, ISBN 0-471-49926-9 , 2003, Vol. 1, pp. ix 23

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Fuel Cell Operation

Ideal (thermodynamic)

Fuel Cell EMF at No Loadcm2

Act ivation Loss

Tafel Equation

tageV 1. ActivationRegion

3. Mass Transport or

Concentration Region

1.0

Density

W

Power Density Curve

0lnA

IV A I

CellVol

2. Ohmic Region0.5

CellPowerm c eg on

.R

V R I

Concentration EThermod namicall

Current Density A/cm2

I V CurvePolarization

Region

mnI

C mV mI e

predicted Fuel cell

Voltage o/p -

theoretically

A system constant

I0 current density where voltage starts to drop initially

R Ohmic resistance by polymer electrolyte membrane

-

Overall dependence between the

the voltage and the current density

,

Im start of non-linear region star t of mass transfer0 A R C


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Methodology I

Size, Power Density

Requirements

Field Test

Design

YES

CompactModelCellmeets

Application

Design

OK?

NO pecs

Fabrication LabTest


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Uniformdistributionof

fuel

and

oxidant

inside

cell

Uniformtemperaturedistributioninsidecell

Electricalcontactsvs.porosity(GDLinterfacewithelectrode)

Properselectionofmaterials(electrode,membrane)


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Ion Flux Map Micro-PEM Fuel Cell

es gn arac er s cs Cell length (L) 200 micron

Channel height 10 micron

Channel width 70 micron

Rib width 90 micron

GDL width 30 micron

orous e ectro e t c ness m cron

Membrane thickness 50 micron

GDL electric conductivity 1000 S/m Inlet H2 mass fraction (anode) 0.743

Inlet H2O mass fraction (cathode) 0.023

Inlet oxygen mass fraction (cathode) 0.228

.

Cathode inlet flow velocity 0.5m/s

Permeability (porous electrode) 2.36 E -12 m2

Membrane conductivity 10 S/m

AssumptionsMembrane is 100% humidified

No hydrogen cross over

9[3] Ramesh P.,S.S Dimble,V Agarwal, S.P Duttagupta ,Performance of miniature fuel cells with segmented contacts attached to the

GDL,International conference on Electric Power and Energy Systems, Sharjah, 2011

Reacting gases are ideal

Water produced is in gaseous state


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Conventional PEM Fuel Cell Components

Proton Exchange Membrane Fuel Cell PEMFC [1]

Fuel Cell Chemistry Anode

Anode Side2H2 => 4H+ + 4e-

Cathode Side Cathode

Conducts electrons freed fromhydrogen molecules so that the free

e- can be used in external circuitry

O2 + 4H+ + 4e- => 2H2O

Net Reaction

2H2 + O2 = 2H2o

Oxidant

O2

Catalyst,

PlatinumProtonExchange

Anode,

FuelH2

Channels etched on anode

disperses the hydrogen gas equally

over the surface of the catalyst

ParticlesMembrane,

ElectrolyteCathode

Conducts electrons back fromConducts only +ve ions and blocks electrons. Hydration Reqd.

Electro lyte (PEM)

ex erna c rcu ry o ca a ys w erethey recombine with O2 and H+

Channels etched on cathode

distribute the ox en to the surface

NAFION is most widely used proton conductor in fuel cells [[22]]

Not easily patterned using photolithography, not easy to integrate

of the catalystBonding with Si is challenging under working Fuel Cell conditions

[1] Fuel Cell Handbook, Fundamentals and Survey of Systems,John Wiley Publication, ISBN 0-471-49926-9 , 2003, Vol. 1, pp. ix 23

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Nano-Porous Si Membrane [2]

A) B)

Prime grade boron doped p type

double side polished Silicon Post-lithography

wafer with 100 mm diameter

and 0.02 ohm - cm resistivity

w n ows or 3 4 c ng

Si Membrane Thickness 100 -meter

C) D)

Each well area - 0.0625 cm2

Reactive Ion Etching with SF6 Plasma

selective removal of Si3N4

Deep Reactive Ion Etching of Siliconthrough wells to create Silicon Membrane

[2] Kaun-Lun Chu et al. , A Nanoporous Silicon Membrane Electrode Assembly for On-Chip Micro Fuel Cell Applications, IEEE, Journ. MEMS Syst., Vol .15, (2006) 671


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NP Si Membrane Formation [2]

Removal of native oxide by immersion of

Silicon Wafer in Buffered Oxide Etch Soln.

Deposition on both s ides of wafer

ICPCVD or LPCVD

AB) II AB) III

Applicat ion of photoresist coating

On Silicon Nitride surface Photolithography

Silicon Substrate Silicon Nitride Insulator Photoresist Photo Mask



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SEM TOP View of Silicon WellFormed after DRIE of Substrate [2]

Low Magnification - 500 Micro Meters Side View of Well Walls in Silicon

High Magnification - 100 Nano Meters



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NP Si Membrane Formation [2]Nanoporous Si membrane

E)

-

at wafer back for electrical contact generation.

AZ 4903 photoresist spin coated on Cr-Au

layer to protect from acid etching

- chemical etching.

Cr - Au and Photoresist still existing

G)

r - u ayer an otores st remove yPiranha solution and Chrome etchant

Piranha solution - 1:3 volume ratio of 30 wt. % H2O2 (aq.) : 98 wt.% H2SO4

AZ 4903 Photoresist Cr-Au Layer Porous Si licon Membrane



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Setup for Nano Porous

Electrolyte is constantly stirred by magnetic rotor, constant current of 40 mA/cm2

PlatinumSilicon

Cathode

Electrolyte-

Nanopores are

formed by

Ethanol and

49wt.% HF 1:1

etching of Silicon

Membrane



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Porous Silicon Membrane



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Nano Porous (DFAFC)

This TiO la er makes anode

u l

5 M Formic Acid and

0.5 M H2SO4 is Fuel

catalyst layer surface hydrophilic.

Hence, fuel gets attracted tocatalyst to ease anode reaction

Reactions

Load Current

Silicon Bulk

Voltage

Silicon Nitride Insulator Gold Contact LayerPorous Silicon Membrane

Platinum Cathode Palladium AnodeInsulation (TiO2 or SiO2)

Prevents short circuit

between anode and cathode



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Mi r F l ll T P r m r

Dynamic

Impedance

Spectroscopy

Ion uxmapping

Transient

impact,

fuel/oxidant

contaminants

Transientimpact,downstreampowerconverternoise

Degradation(fueldepletion,hotspotformation,catalystpoison)


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Fuel Cell Test Setup


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References PEMFC Design & Fabrication

[1] Fuel Cell Handbook , Fundamentals and Survey of Systems, John Wiley

, - - - , , . , .

[2] Kaun-Lun Chu et al. , A Nanoporous Silicon Membrane Electrode

Assembly for On-Chip Micro Fuel Cell Applications, IEEE, Journal of

Michroelectro-mechanical Systems, Vol.15, No.- 3, June 2006, pp. 671 -677

[3] Ramesh P., S.S Dimble, V. Agarwal, S.P Duttagupta, Performance ,

International conference on Electric Power and Energy Systems,

Sharjah, 2011

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Methodology-II

MEMSSensorNetworkforReliableOperation

MarkettrendinFCresearchistoreducecomponentcost

Researchcanreducesystemcostinthelongrunbyreverting

de radationinFCincreasesh brid sourceli etime

WSNbasedpredictivecontrolhelpstostabilizeFCpoweroutput


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FuelCellPerformanceParameters

Studyofoutputpowerdropbecauseof

Degradationof

electrode

and

ion

mass

transport

through

membrane

2

poisonsthenanoPtcrystalsofelectrodeirreversibledamage

CO contaminant

anode

reduces

O of

fuel

reversible

dama e

Impactofpowerconvertersonelectrodeelectrochemicalsurfacearea

LowfrequencyreverseripplefromDCACconverters

High

switching

frequency

and

load

fluctuation

of

DC

DC

converters

Localizedvariationinhumidityandtemperature(hotspots)

Impactsnearelectrodemembranemorphology(ionflow)


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Field Deployed Air PEMFC-Reliable Operation

air in

range sensing through

backscattering

air fuel cell

protecting chamberlaser

diodeCO sensor grid- proximity plume

tracking and

nozz e ap

control

air out

air

orecas ng

cell

CO sensor

compressed

electricheater

coil

vaporwater

2 s orage

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CO Estimation in Dynamic Smoke Plume

Assumption: No air velocity network of 8 CO sensors placed elliptically

vertical

profilehorizontalprofile

mean

CO Gaussian dispersion profile

- to be estimated

Localization of CO dispersion profile

- estimated using ML estimation

CO propagation constant determined experimentally 2.65

CO2 propagation constant 2.3 25 / 30


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Optimization of Proton Transport in Membrane

PerFluoroSulfonic polymer (NAFION) membrane in

NAFION in hydrophilic domain responsible for

proton transport

Membrane fully hydrated to maintain continuous

ionconductivity through hopping mechanism

reducing ion conductivity, lower fuel cell power output

Optimizationofmembranehumidityformaximum

ionconductivity

is

to

be

studied


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Multi-parameter FC Degradation

Fuel Cell

Power Density

water vapor mass

fraction at cathode CO2 mass fraction

at cathode

dynamicmembrane

impedance

dynamic change inelectrode impedance

for change in CO

densit at cathode air

time (minutes)


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References Fuel Cell Optimization1) S.Mitra,K.Tuckley,andS.P.Duttagupta,2DLocalizationandthreatestimationofnoxiousgassource

originatingfromburiedlandfills,ProceedingsofInternationalConference,USCUDAR2011,Prague,Czech

Republic,Sep.2011,pp.148 154.

2) S.Mitra,S.P.Duttagupta,K.Tuckley,andS.Ekram,Wirelesssensornetworkbasedlocalizationandthreat

estimationofhazardouslandfillgassource, InPressProceedingsofIEEEInternationalConference,ICIT

2012,

Athens,

Greece,

March

2012.3) S.Mitra,S.P.Duttagupta,K.Tuckley,andS.Ekram,3Dadhocsensornetworksbasedlocalizationandrisk

assessmentofburiedlandfillgassource,NAUN/WSEASInternationalJournalofCircuits,Systemsand

, . , , , . .

4) S.Mitra,Ramesh P.,M.Bhattacharyya,andS.P.Duttagupta,Multimodesensingtechniqueforcarbon

monoxideplumetrackingandforecastingforreliablefielddeployedairbreathingPEMfuelcelloperation,

InPressProceedingsofISPTS1,Pune,India,March2012.

5) M.W.Elis,M.R.VSpakovsky,D.J.Nelson,Fuelcellsystems:efficient,flexibleenergyconversionforthe21st

century,ProceedingsofIEEE,InvitedPaper,Vol.89,No.12,December2001,pp.18081818.

6) W.P.Teagan,J.Bentley,andB.Barnett,Costreductionsoffuelcellsfortransportapplications:fuelprocessing

options,JournalofPowerSources,Vol.71,No.12,1998,pp.8085.

7 Y. Gao M. Ehsani S stematic desi n of fuel cell owered h brid vehicle drive train Electric Machines and

DrivesConference,

IEMDC

2001,

Cambridge,

America,

2001,

pp.

604611.

8) C.Changsong,D.Shanxu,Y.Jinjun,Researchofenergymanagementsystemofdistributedgenerationbased

onpowerforecasting,inProceedingofInternationalconferenceonElectricalMachinesandSystems,ICEMS

2008,October2008,pp.27342737.

. . c ae, . . u p, ac scattera sorpt ongas mag ng:anewtec n que orgasv sua zat on, ourna o

AppliedOptics,Vol.32,Issue21,1993,pp.40374050.


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References- II10) I.JSimpson,BorealforestfireemissionsinfreshCanadiansmokeplumes:C1C10volatileorganiccompounds

(VOCs),CO2,CO,NO2,NO,HCN,andCH3CN,JournalofAtmos.Chem.Phys.,Vol.11,2011,pp.64456463.

11) T.Zhou,H.Liu,A3DmodelforPEMfuelcellsoperatedonreformate,JournalofPowerSources,Vol.138,

2004,pp.101110.

12) A.Rodrigues,J.C.Amphlett,R.F.Mann,B.A.Peppley,P.R.Roberge,Carbonmonoxidepoisoningofproton

exchange

membrane

fuel

cells,

Proceedings

of

32nd

Intersociety,

IEEE

Energy

Conversion

Engineering

Conference,IECEC97,Honululu,Howai,USA,July1997,pp.768773.

13) K.K.Bhatia,CY.Wang,Transientcarbonmonoxidepoisoningofapolymerelectrolytefuelcelloperatingon

, , . , , . .

14) L.A.M.Riascos,M.G.Simoes, P.E.Miyagi,ControllingPEMfuelcellsapplyingaconstanthumiditytechnique,

inofABCMSymposiumSeriesinMechatronics,Vol.3,2008,pp.774783.

15) B.A.McCain,A.G.Stefanopoulou,I.V.Kolmanovsky,Stabilityanalysisforliquidwateraccumulationinlow

temperaturefuel

cells

in

Proceedings

of

IEEE

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on

Decision

and

Control,

Mexico,

December

2008,

pp.859864.

16) A.Lavrov,A.B.Utkin,R.Vilar,A.Fernandes,EvaluationofsmokedispersionfromforestfireplumesusingLIDAR

experimentsandmodelingElsevierInt.tional JournalofThermalSciences,Vol.45,2006,pp.848859.

17) Y.Zhang,L.Wang,Aparticlefilteringmethodforodorsourcelocalizationinwirelesssensornetworkwith

mobile robot in Proceedin s of the IEEE 8th World Con ress on Intelli ent Control and Automation China Jul

2010,pp.

70327036.

18) S.Sundhar,V.V.Veeravalli,Localizationandintensitytrackingofdiffusingpointsourcesusingsensor

networks,inProceedingsofIEEEGLOBECOM,Washington,DC,USA,November2007,pp.14.

19) P.Wang,D.W.Coit,Reliabilitypredictionbasedondegradationmodelingforsystemswithmultiple

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USA,January2004,pp.302307.

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Dr. M. Bhattacharyya, Dr. A.V. Kshirsagar,

Dr. S. Mehta (Post-doctoral Research Scholar)

B Patnaik, SS Dimble, Ramesh P, A Das,

U Chatterjee, R Rashmi, S Mitra, K Ghosh,, , , ,

B Somaiah, S Roy (Ph.D. Research Scholar)

S Shyamsundar, J Mohod, H Manaswala, N Patel,P Chafekar, D Soni (M.Tech. Research Scholar)

INUP Presentation Apr 2012

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