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Aplicaciones con
ANSYS
Presenta:Moiss Vzquez Toledo
26 agosto del 2013, Silao, GtoClase muestra
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Contenido Introduccin
o Interfaz de ANSYS
Modelado con ANSYS
o Anlisis Modal
o Anlisis Harmnicoo Anlisis Estructural
Modelos Analticos
o Anlisis Modal
o Anlisis Harmnicoo Anlisis Estructural
Resultados
Conclusin
Clase muestra 26 agosto del 2013, Silao, Gto
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Introduccin
Clase muestra 26 agosto del 2013, Silao, Gto
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Introduccin
Clase muestra 26 agosto del 2013, Silao, Gto
Preprocessing
Solution
Postprocessing
Interfaz de ANSYS
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Modelado con ANSYS
Clase muestra 26 agosto del 2013, Silao, Gto
Analizar el comportamiento dinmico de un micro-cantilevers, este microresonador es el componentemecnico de un sensor basado en tecnologa MEMS.
Geometra500 28 5
Propiedades de Silicio
= 169.8 = 0.066 = 2330 .
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Modelado con ANSYS
Clase muestra 26 agosto del 2013, Silao, Gto
Anlisis Modal
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Numerical Modelo Natural frequency
May 14 , 2013, Albuquerque, NMDepartment of Mechanical Engineering
tFuKuCuM
0 uKuM
)sin( tUu
02 uMK
Sensor design
(17)
(18)
(19)
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o Harmonic Solution
May 14 , 2013, Albuquerque, NMDepartment of Mechanical Engineering
titiititii
euiueeuu
eFiFeeFF
)(
)(
21max
21max
)())(( 21212
FiFuiuKCiM
Sensor design
(20)
(21)
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IntroductionMEMS technology can allow the development ofmagnetic field sensors.
Advantages:o Small size
o Low power consumption
o High resolution
o Fast responseo Minimum cost
May 14 2013, Albuquerque, NMDepartment of Mechanical Engineering
Fig. 1. Sensor applications. [1]
[1] http://www.diarioelectronicohoy.com/sensor-de-movimiento-mems/
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Introduction Application
May 14 2013, Albuquerque, NMDepartment of Mechanical Engineering
a) b)Fig. 2. a) Schematic diagram of the size and speed measure of vehicle , b) Future medical application of magnetic
field sensor for visualing magnetically market diagnostic capsule [2]
[2] Herrera-May AL, Aguilera-Cortes LA. Garca-Ramirez PJ. Resonant Magnetic Field Sensors Based On MEMS Technology. Sensors. 2009; 9(10): 7785-7813. doi:10.3390/s91007785.
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Introduction Application
May 14 2013, Albuquerque, NMDepartment of Mechanical Engineering
a)Fig. 3. a) Schematic vies of an inspection platform of oil pipeline wall that consiste of a rotating permanent magneticexciter and an array of magnetic field microsensor[3], b) Effect on the vehicle stability achieved with an ESP system
[3] Herrera-May AL, Aguilera-Corts LA, Garca-Ramrez PJ, Nelly B. Mota-Carrillo, Wendy Y, Padrn-Hernndez, Figueras E. Development of Resonant Magnetic FieldMicrosensors: Challenges and Future Applications. Microsensors. India: INTECH; 2011: 65-84. ISBN 978-953-307-170-1.
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Sensor design SUMMit V process
May 14 2013, Albuquerque, NMDepartment of Mechanical Engineering
Fig. 4. SUMMit V fabrication process.
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Sensor design Structural configuration
May 14 2013, Albuquerque, NMDepartment of Mechanical Engineering
Fig. 5. Main dimensions of MEMS sensor.
26
28
2
150
20
0
466
30
30
100
100
2
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Sensor design Principle operation
May 14 2013, Albuquerque, NMDepartment of Mechanical Engineering
Fig. 6. Operation principle of the MEMS sensor.
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Sensor design Principle operation
May 14 2013, Albuquerque, NMDepartment of Mechanical Engineering
Fig. 7. Schematics of the signal conditiong systemfor the magnetics field sensor. [2]
ByMagnetic field
densities
VCSELPhototransistor
PIC
LC
DRegulator 2
Electronic
oscillator
Current
source
Regulator 1
Battery
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Sensor design Analytical Model
o Natural frequency
May 14 2013, Albuquerque, NMDepartment of Mechanical Engineering
(05)
(06)
(07)
(08)
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Sensor design Analytical Model
o Damping Models
Viscous damping
May 14 2013, Albuquerque, NMDepartment of Mechanical Engineering
(09)
(10)
(11)
(12)
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Sensor design Analytical Model
Support Loss
Thermoelastic damping
May 14 2013, Albuquerque, NMDepartment of Mechanical Engineering
(13)
(14)
(15)
=
=
6
6
sinh + sin
cosh + cos
=
=1
2 (16)
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Numerical Modelo Natural frequency
May 14 , 2013, Albuquerque, NMDepartment of Mechanical Engineering
tFuKuCuM
0 uKuM
)sin( tUu
02 uMK
Sensor design
(17)
(18)
(19)
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o Harmonic Solution
May 14 , 2013, Albuquerque, NMDepartment of Mechanical Engineering
titiititii
euiueeuu
eFiFeeFF
)(
)(
21max
21max
)())(( 21212
FiFuiuKCiM
Sensor design
(20)
(21)
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Sensor design Numerical Model
May 14 2013, Albuquerque, NMDepartment of Mechanical Engineering
Fig. 8. Element type
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Result
May 14 2013, Albuquerque, NMDepartment of Mechanical Engineering
Fig. 8. Initial displacement (Joule effect).
Data Value
Current (mA) 1
Voltage (mV) 5.03
ElectricalResistecial ()
5.03
InitialDeformation (nm)
8.46
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Result
May 14 2013, Albuquerque, NMDepartment of Mechanical Engineering
10.66 %
ModelsFrequency (kHz)
Numeric 48.326
Analytic 54.094
Fig. 8. Modal analysis
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Result
May 14 2013, Albuquerque, NMDepartment of Mechanical Engineering
Fig. Linear respounse.
0
1
2
3
4
5
6
7
8
100 600 1100 1600 2100 2600
Displacement(m)
Magnetic Field (mT)
Displace
0
1
2
3
4
5
6
7
8
32,320 37,120 41,920 46,720 51,520
OutputDisplacemen
t(m)
Frequency (kHz)
1000 mT
2000 mT
3000 mT
Fig. 8. Maxima displacement in resonans respons.
Atmospheric pressure
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Result
May 14 2013, Albuquerque, NMDepartment of Mechanical Engineering
Pressure work 10 Pa
Pressure(Pa)
Resolution (T)
Powerconsumption
(W)
101 325 3000 5.03
10 117 5.03
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Result
May 14 2013, Albuquerque, NMDepartment of Mechanical Engineering
0
20
40
60
80
100
120
32,320 37,120 41,920 46,720 51,520
OperationStress(MPa)
Frequency (Hz)
Principal Stress
1000 105.872
= 9.4
= 1000
= 0.5 ()
500 105.872
=4.7
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Conclusions
May 14 2013, Albuquerque, NMDepartment of Mechanical Engineering
The sensor consists of two u-shaped beams. These beamsare orthogonally joined between them.
This sensor can work for both atmospheric pressure and10 Pa pressure, respectively.
This sensor has a simple optical sensing system. The FEM and analytical models were made to resonanse
frequency of the sensor. This sensor presented a linear response for cases studied.
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Acknowledgments
May 14 , 2013, Albuquerque, NMDepartment of Mechanical Engineering